关键词:
Thermodynamics
Thermodyamic modeling
Growth of elemental and compound semiconductors
Heteroepitaxial growth
Non-stoichiometry
Impurities in elemental and compound semiconductors
Thermodynamics and kinetics of defect and impurity interactions in semiconductors
Physical chemistry
Thermal annealing of semiconductors
ISBN:
(数字)9781118514603;9781118514559 ISBN:
(纸本)9781118514573
摘要:
The development ofsolid statedevices began a little more than a century ago, with the discovery of the electrical conductivity of ionic solids. Today, solid state technologies form the background of the society in which we live. The aim of this book is threefold: to present the background physical chemistry on which the technology ofsemiconductor devices is based; secondly, to describe specific issues such as the role of defects on the properties of solids, and the crucial influence of surface properties; and ultimately, to look at the physics and chemistry of semiconductor growth processes, both at the bulk and thin-film level, together with some issues relating to the properties of nano-devices. Divided into five chapters, it covers:
- Thermodynamics of solids, including phases and their properties and structural order
- Point defects in semiconductors
- Extended defects in semiconductors and their interactions with point defects and impurities
- Growth of semiconductor materials
- Physical chemistry of semiconductor materials processing
With applications across all solid state technologies,the book is useful for advanced students and researchers in materials science, physics, chemistry, electrical and electronic engineering. It is also useful for those in the semiconductor industry.