关键词:
cantilever actuator
dc contact
low-voltage operation
piezoelectric
radio frequency (RF) microelectromechanical system (MEMS) switch
摘要:
In this paper, fully integrated radio frequency (RF) microelectromechanical system (MEMS) switches with piezoelectric actuation have been proposed, designed, fabricated, and characterized. At a very low operation voltage of 2.5 V, reliable and reproducible operation of the fabricated switch was obtained. The proposed RF MEMS switch is comprised of a piezoelectric cantilever actuator with a floated contact electrode and isolated CPW transmission line suspended above the silicon substrate. The measured insertion loss and isolation of the fabricated piezoelectric switch are -0.22 dB and -42 dB at a frequency of 2 GHz, respectively.